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Nextrema is a glass ceramic designed and designed for extreme conditions with a sleek appearance such as glass and excellent thermal, chemical and optical properties.
The extremely low thermal expansion glass ceramic Zerodur is an inorganic, non-porous lithium aluminum oxide silicon oxide glass ceramic characterized by nanocrystals evenly distributed within residual glass.
High precision in fine-grained, state-of-the-art applications, making glass ceramics suitable for IC (Interated Circuit) and FPD (Flat Panel Display) lithography, high-precision metering and astronomy, where geometric shapes and distance changes should be minimized as much as possible.
CTE Grades | CTE (0°C; 50°C)* |
---|---|
ZERODUR® Expansion Class 2 | 0 ± 0.100 ppm/K |
ZERODUR® Expansion Class 1 | 0 ± 0.050 ppm/K |
ZERODUR® Expansion Class 0 | 0 ± 0.020 ppm/K |
ZERODUR® Expansion Class 0 SPECIAL | 0 ± 0.010 ppm/K |
ZERODUR® Expansion Class 0 EXTREME | 0 ± 0.007 ppm/K |
ZERODUR® TAILORED | Tailored ± 0.020 ppm/K (± 0.010 ppm/K upon request) Optimized for application temperature profile |
* CTE (0°C; 50°C) represents the average coefficient of linear thermal expansion in the temperature range.
Alumina is a high-tech refinement that contains more than 80% of alumina, known as alumina ceramics, and is an oxide of aluminum that is used as the main ingredient of ceramics along with silica.
Aluminum oxide is a compound of aluminum and oxygen. High purity alumina, commonly used for pine ceramics, is a fine powder with a purity of over 99.5% and an average particle size of less than 1㎛ , which is relatively well-sourced alumina powder.
Silicon carbide (SiC) is a compound material that has better thermal conductivity, corrosion resistance, chemical resistance, and low thermal expansion compared to conventional silicon or quartz materials used in LP-CVD processes, so it is less likely to break even in long-term use.